Linear Planar Servo Motor
Feature
The planar motor LMSP has integrated distance measurement sensors and works with position control (closed loop).
0.001 mm
Repeatability
Stator Area up to
1000x1000mm
0.001 mm
Resolution
The planar motor LMSP has integrated distance measurement sensors and works with position control (closed loop).
Repeatability
1000x1000mm
Resolution
